Characterization of thin layers by X-ray reflectometry

被引：0
|
作者：
Zymierska, D [1 ]
Sobczak, E [1 ]
Godwod, K [1 ]
Miotkowska, S [1 ]
机构：
[1] Polish Acad Sci, Inst Phys, PL-02668 Warsaw, Poland
来源：
APPLIED CRYSTALLOGRAPHY | 1998年
关键词：
D O I：
暂无
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The paper presents an application of the grazing incidence X-ray reflectivity method for rapid nondestructive characterization of thin films and interfaces, independently On the amorphous or crystalline structure. The total thickness of multilayer can be determined from the period of interference fringes (Kiessig's fringes) and superlattice period from the positions of Bragg peaks.
引用
收藏
页码：394 / 397
页数：4
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