Level-set strategy for inverse DSA-lithography

被引：6

作者：

Ouaknin, Gaddiel Y. ^{[1
]}

Laachi, Nabil ^{[5
]}

Delaney, Kris ^{[5
]}

Fredrickson, Glenn H. ^{[3
,4
,5
]}

Gibou, Frederic ^{[1
,2
]}

机构：

[1] Univ Calif Santa Barbara, Dept Mech Engn, Santa Barbara, CA 93106 USA

[2] Univ Calif Santa Barbara, Dept Comp Sci, Santa Barbara, CA 93106 USA

[3] Univ Calif Santa Barbara, Dept Chem Engn, Santa Barbara, CA 93106 USA

[4] Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USA

[5] Univ Calif Santa Barbara, Mat Res Lab, Santa Barbara, CA 93106 USA

来源：

JOURNAL OF COMPUTATIONAL PHYSICS | 2018年 / 375卷

基金：

美国国家科学基金会;

关键词：

Level-set; SCFT; Inverse problems; DSA; Lithography; Shape optimization; BLOCK-COPOLYMER; IRREGULAR DOMAINS; HOMOPOLYMER; POLYMERS; SIMULATIONS; CURVATURE; ALGORITHM; DIFFUSION; EQUATION;

D O I：

10.1016/j.jcp.2018.09.021

中图分类号：

TP39 [计算机的应用];

学科分类号：

081203 ; 0835 ;

摘要：

We introduce a level-set strategy to find the geometry of confinement that will guide the self-assembly of block copolymers to a given target design in the context of lithography. The methodology is based on a shape optimization algorithm, where the level-set normal velocity is defined as the pressure field computed through a self-consistent field theory simulation. We present numerical simulations that demonstrate that this methodology is capable of finding guiding templates for a variety of target arrangements of cylinders and thus is an effective approach to the inverse directed self-assembly problem. (C) 2018 Elsevier Inc. All rights reserved.

引用

页码：1159 / 1178

页数：20

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