Fabrication of microstructures on silicon by multiple beam holographic method using nanosecond laser pulses

被引：0
|
作者：
Zhang, Heng [1 ]
Fang, Zongbao [1 ]
Chen, Linsen [1 ]
机构：
[1] Soochow Univ, Inst Informat Opt Engn, Suzhou, Peoples R China
来源：
HOLOGRAPHY, DIFFRACTIVE OPTICS, AND APPLICATIONS IV | 2010年 / 7848卷
关键词：
nanosecond laser; Laser ablation; Interference; polished silicon; micro-grating structure; dot array; thermal diffusion; solar cell; INTERFERENCE; DESIGN;
D O I：
10.1117/12.870325
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Micron-sized grating structures (MGS) and sub-micron sized dot arrays (DA) were generated on silicon target by multiple shots of interfering nanosecond laser beams. The mechanism to form MGS and DA were analyzed and it is found that the obtained structures have a negative shape of the interference pattern. The most major size of the periodic structure is 500 nm. The optical properties of these nanostructures are also investigated. The silicon DAs function as both absorber and antireflection layers, which offer a promising approach to enhance the solar cell energy conversion efficiency.
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页数：6
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