Fabrication of microstructures on silicon by multiple beam holographic method using nanosecond laser pulses

被引：0
|
作者：
Zhang, Heng [1 ]
Fang, Zongbao [1 ]
Chen, Linsen [1 ]
机构：
[1] Soochow Univ, Inst Informat Opt Engn, Suzhou, Peoples R China
来源：
HOLOGRAPHY, DIFFRACTIVE OPTICS, AND APPLICATIONS IV | 2010年 / 7848卷
关键词：
nanosecond laser; Laser ablation; Interference; polished silicon; micro-grating structure; dot array; thermal diffusion; solar cell; INTERFERENCE; DESIGN;
D O I：
10.1117/12.870325
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Micron-sized grating structures (MGS) and sub-micron sized dot arrays (DA) were generated on silicon target by multiple shots of interfering nanosecond laser beams. The mechanism to form MGS and DA were analyzed and it is found that the obtained structures have a negative shape of the interference pattern. The most major size of the periodic structure is 500 nm. The optical properties of these nanostructures are also investigated. The silicon DAs function as both absorber and antireflection layers, which offer a promising approach to enhance the solar cell energy conversion efficiency.
引用
收藏
页数：6
相关论文
共 50 条
  • [21] Laser-induced frontside etching of silicon using 1550-nm nanosecond laser pulses
    Lai, Shengying
    Lorenz, Pierre
    Ehrhardt, Martin
    Han, Bing
    Hirsch, Dietmar
    Zagoranskiy, Igor
    Lu, Jian
    Zimmer, Klaus
    OPTICS AND LASERS IN ENGINEERING, 2019, 122 : 245 - 253
  • [22] Laser-induced frontside etching of silicon using 1550-nm nanosecond laser pulses
    Lai S.
    Lorenz P.
    Ehrhardt M.
    Han B.
    Hirsch D.
    Zagoranskiy I.
    Lu J.
    Zimmer K.
    Optics and Lasers in Engineering, 2019, 122 : 245 - 253
  • [23] Fabrication of light trapping microstructures on stainless steel surface by nanosecond laser
    Wu, Bo
    Zhou, Ming
    Li, Baojia
    Cai, Lan
    Zhongguo Jiguang/Chinese Journal of Lasers, 2013, 40 (09):
  • [24] Fabrication of birefringent microstructures in transparent materials with femtosecond laser pulses
    Watanabe, W
    Yamada, K
    Kuroda, D
    Shinagawa, T
    Asano, T
    Nishii, J
    Itoh, K
    PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS, 2002, 4637 : 197 - 203
  • [25] Fabrication of holographic optical elements on silver by nanosecond IR laser source
    Alexandropoulos, Dimitris
    Mazzucato, Simone
    Karoutsos, Evangelos
    Tessaro, Carlo
    Politi, Christina
    Vainos, Nikolaos
    MICROELECTRONIC ENGINEERING, 2020, 227
  • [26] Formation mechanisms of silicon surface structuring using single-multiple nanosecond laser pulses in ambient air and cold plasma
    Aslam, Nazim
    Khan, Taj Muhammad
    Javed, Muhammad Qasim
    Rehman, Abdur
    Abbasi, Shahab Ahmed
    Shah, A.
    Raffi, Muhammad
    SURFACES AND INTERFACES, 2023, 41
  • [27] Fast fabrication of silicon based microstructures using 355 nm UV laser
    Pan, CT
    Hwang, YM
    Hsieh, CW
    MATERIALS SCIENCE AND TECHNOLOGY, 2005, 21 (11) : 1344 - 1348
  • [28] Research on the Processing of Microstructures on Silicon Carbide Surfaces Using a Blowing-Assisted Nanosecond Laser
    Zhang, Suorong
    Li, Jian
    He, Bin
    Yuan, Jian
    Chen, Guoyan
    APPLIED SCIENCES-BASEL, 2022, 12 (21):
  • [29] Influence of Laser Beam Polarization on Micromachining of Crystalline Silicon Using Ultrafast Laser Pulses
    Jagdheesh, R.
    Valarmathi, A.
    Sivakumar, M.
    LASERS IN ENGINEERING, 2015, 32 (1-2) : 19 - 35
  • [30] Nanosecond laser induced periodic silicon microstructures for broadband antireflective applications
    Kuriakose, Albin
    Malik, Pariksha
    Acharyya, Jitendra Nath
    Kalyanasundaram, Dinesh
    Srivastava, Pankaj
    Prakash, G. Vijaya
    OPTICS AND LASER TECHNOLOGY, 2024, 179
12345