Electrical, Optical, and Mechanical Properties of Amorphous Hydrogenated Carbon Obtained under Various Deposition Conditions

被引：1

作者：

Babaev, A. A. ^{[1
]}

Sultanov, S. B. ^{[1
]}

Abdulvagabov, M. Sh. ^{[2
]}

Terukov, E. I. ^{[3
]}

机构：

[1] Russian Acad Sci, Dagestan Sci Ctr, Inst Phys, Makhachkala 367003, Dagestan, Russia

[2] Dagestan State Univ, Makhachkala 367025, Dagestan, Russia

[3] Russian Acad Sci, AF Ioffe Phys Tech Inst, St Petersburg 194021, Russia

来源：

SEMICONDUCTORS | 2011年 / 45卷 / 01期

关键词：

C-H FILMS; LIQUID-CRYSTAL; DIAMOND-LIKE;

D O I：

10.1134/S1063782611010039

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

Activation energy of dc conductivity, refractive index, and microhardness of amorphous hydrogenated carbon films a-C:H have been studied. The films are produced from a methane-argon mixture under various deposition conditions on quartz and silicon substrates: E/p = 40-180 V/mPa (E is the electric-field strength in the space between the electrodes, and p is the gas mixture pressure in the chamber) and substrate temperature T-s = 50-300 degrees C. In these deposition conditions, diamond-like, polymer-like, and graphite-like a-C:H films can be obtained with widely varying activation energy of conductivity, microhardness, and refractive index.

引用

页码：118 / 120

页数：3

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