Observations of the microscopic growth mechanism of pillars and helices formed by glancing-angle thin-film deposition

被引：95

作者：

Malac, M ^{[1
]}

Egerton, RF ^{[1
]}

机构：

[1] Univ Alberta, Dept Phys, Edmonton, AB T6G 2J1, Canada

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 2001年 / 19卷 / 01期

关键词：

D O I：

10.1116/1.1326940

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We have studied the mechanisms influencing growth of thin films onto an oblique rotating substrate by cross-sectional transmission electron microscopy and scanning electron microscopy. We have analyzed the growth of pillars and helices in random and regular arrays, and have examined the influence of introducing a line of missing nuclei on the growth of regular array of pillars and helices. (C) 2001 American Vacuum Society. [DOI: 10.1116/1.1326940].

引用

页码：158 / 166

页数：9

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