Observations of the microscopic growth mechanism of pillars and helices formed by glancing-angle thin-film deposition

被引：95
|
作者：
Malac, M [1 ]
Egerton, RF [1 ]
机构：
[1] Univ Alberta, Dept Phys, Edmonton, AB T6G 2J1, Canada
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 2001年 / 19卷 / 01期
关键词：
D O I：
10.1116/1.1326940
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
We have studied the mechanisms influencing growth of thin films onto an oblique rotating substrate by cross-sectional transmission electron microscopy and scanning electron microscopy. We have analyzed the growth of pillars and helices in random and regular arrays, and have examined the influence of introducing a line of missing nuclei on the growth of regular array of pillars and helices. (C) 2001 American Vacuum Society. [DOI: 10.1116/1.1326940].
引用
收藏
页码：158 / 166
页数：9
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