Fabrication and electric properties of LaCoO3 thin films by ion-beam sputtering

被引：10
|
作者：
Hattori, T [1 ]
Matsui, T [1 ]
Tsuda, H [1 ]
Mabuchi, H [1 ]
Morii, K [1 ]
机构：
[1] Univ Osaka Prefecture, Grad Sch Engn, Dept Met & Mat Sci, Sakai, Osaka 5998531, Japan
来源：
THIN SOLID FILMS | 2001年 / 388卷 / 1-2期
基金：
日本学术振兴会;
关键词：
annealing; electrical properties and measurements; oxides; sputtering;
D O I：
10.1016/S0040-6090(01)00822-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We have successfully produced LaCoO3 thin films by ion-beam sputtering and subsequent heat treatment. The compacts of La2O3 and CoO powder mixture were used for the targets. The films were mainly composed of the LaCoO3 phase, with a very small amount of an unidentified second phase. The resistivity at room temperature for the annealed 50 at.% La sample was determined to be 51 Omega m, whereas at high temperature, the resistivity was found to be same order of that for bulk LaCoO3, that is, comparable to the resistivity for metals. The possibility of a metal-insulator transition is described. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：183 / 188
页数：6
相关论文
共 50 条
  • [1] ION-BEAM SPUTTERING OF THIN-FILMS
    KANE, SM
    AHN, KY
    TUXFORD, AM
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (08) : C309 - C309
  • [2] Thermoelectric properties of CoSb3 thin films prepared by ion-beam sputtering
    Yamashita, Y
    Matsui, T
    Morii, K
    JOURNAL OF THE JAPAN INSTITUTE OF METALS, 2000, 64 (05) : 351 - 354
  • [3] ION-BEAM SPUTTERING AND PROPERTIES OF YBACUO SUPERCONDUCTING THIN-FILMS
    PAVUNA, D
    BAER, W
    BERGER, H
    MATHIEU, HJ
    VOGEL, A
    SCHMIDT, M
    GASPAROV, V
    AFFRONTE, M
    VASEY, F
    REINHART, FK
    PHYSICA C, 1988, 153 (02): : 1449 - 1450
  • [4] Properties of films obtained by ion-beam sputtering
    Muranova, G.A.
    Smirnov, N.N.
    Journal of Optical Technology (A Translation of Opticheskii Zhurnal), 2001, 68 (04): : 282 - 286
  • [5] Properties of films obtained by ion-beam sputtering
    Muranova, GA
    Smirnov, NN
    JOURNAL OF OPTICAL TECHNOLOGY, 2001, 68 (04) : 282 - 286
  • [6] Preparation of PbTiO3 thin films by ion-beam sputtering
    Hashima, H
    Nakajima, S
    Suzuki, Y
    Ogawa, S
    THIN SOLID FILMS, 1996, 281 : 463 - 465
  • [7] ION-BEAM SPUTTERING OF ZNS THIN-FILMS
    VARITIMOS, TE
    TUSTISON, RW
    THIN SOLID FILMS, 1987, 151 (01) : 27 - 33
  • [8] Ion-beam sputtering deposition of CsI thin films
    Nitti, MA
    Valentini, A
    Senesi, GS
    Ventruti, G
    Nappi, E
    Casamassima, G
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2005, 80 (08): : 1789 - 1791
  • [9] Ion-beam sputtering deposition of CsI thin films
    M.A. Nitti
    A. Valentini
    G.S. Senesi
    G. Ventruti
    E. Nappi
    G. Casamassima
    Applied Physics A, 2005, 80 : 1789 - 1791
  • [10] Preparation and magnetic properties of 'Super Sendust' thin films by ion-beam sputtering
    Utsushikawa, Y.
    IEEE translation journal on magnetics in Japan, 1988, 3 (07): : 595 - 596
12345