Properties of films obtained by ion-beam sputtering

被引：0
|
作者：
Muranova, G.A. [1 ]
Smirnov, N.N. [1 ]
机构：
[1] S. I. Vavilov Stt. Optical Institute, St. Petersburg, Russia
来源：
Journal of Optical Technology (A Translation of Opticheskii Zhurnal) | 2001年 / 68卷 / 04期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
7
引用
收藏
页码：282 / 286
相关论文
共 50 条
  • [1] Properties of films obtained by ion-beam sputtering
    Muranova, GA
    Smirnov, NN
    JOURNAL OF OPTICAL TECHNOLOGY, 2001, 68 (04) : 282 - 286
  • [2] Stoichiometry of Silicon Dioxide Films Obtained by Ion-Beam Sputtering
    Telesh, E. V.
    Dostanko, A. P.
    Gurevich, O. V.
    JOURNAL OF APPLIED SPECTROSCOPY, 2018, 85 (01) : 67 - 72
  • [3] Stoichiometry of Silicon Dioxide Films Obtained by Ion-Beam Sputtering
    E. V. Telesh
    A. P. Dostanko
    O. V. Gurevich
    Journal of Applied Spectroscopy, 2018, 85 : 67 - 72
  • [4] SUPERCONDUCTING PROPERTIES OF NIOBIUM FILMS SUBJECTED TO ION-BEAM SPUTTERING
    KRAVCHENKO, VV
    MARKUS, AI
    KRIVOBOK, VV
    VELICHKO, NI
    UDOVENKO, VF
    BONDARENKO, SI
    SALTEVSKII, GI
    FIZIKA TVERDOGO TELA, 1980, 22 (04): : 1247 - 1249
  • [5] ION-BEAM SPUTTERING OF THIN-FILMS
    KANE, SM
    AHN, KY
    TUXFORD, AM
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (08) : C309 - C309
  • [6] Magnetic properties of amorphous iron nitride films by ion-beam sputtering
    Dubey, R
    Gupta, A
    JOURNAL OF APPLIED PHYSICS, 2005, 98 (08)
  • [7] ION-BEAM SPUTTERING AND PROPERTIES OF YBACUO SUPERCONDUCTING THIN-FILMS
    PAVUNA, D
    BAER, W
    BERGER, H
    MATHIEU, HJ
    VOGEL, A
    SCHMIDT, M
    GASPAROV, V
    AFFRONTE, M
    VASEY, F
    REINHART, FK
    PHYSICA C, 1988, 153 (02): : 1449 - 1450
  • [8] ION-BEAM SPUTTERING AND DUAL-ION BEAM SPUTTERING OF TITANIUM-OXIDE FILMS
    CEVRO, M
    CARTER, G
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1995, 28 (09) : 1962 - 1976
  • [9] ION-BEAM SPUTTERING OF ZNS THIN-FILMS
    VARITIMOS, TE
    TUSTISON, RW
    THIN SOLID FILMS, 1987, 151 (01) : 27 - 33
  • [10] ION-BEAM SPUTTERING APPARATUS FOR DEPOSITION OF MULTILAYERED FILMS
    SUZUKI, T
    YAMAZAKI, T
    TAKAHASHI, K
    KAGEYAMA, T
    ODA, H
    JOURNAL OF MATERIALS SCIENCE LETTERS, 1988, 7 (01) : 79 - 80
12345