Composition of nanometer-scaled self-assembled SiGe islands

被引：0
|
作者：
Deng, N [1 ]
Zhang, L [1 ]
Chen, PY [1 ]
机构：
[1] Tsinghua Univ, Inst Microelect, Beijing 100084, Peoples R China
来源：
2004: 7TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUITS TECHNOLOGY, VOLS 1- 3, PROCEEDINGS | 2004年
关键词：
self-assembled growth; composition; shape evolution;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Quantitative relation between composition of sellf-assembled SiGe islands and critical size for shape evolution was established. The critical size, at which Ge islands change from pyramids to domes, increases with increasing of Si concentration in islands. Based on the critical size obtained from AFM characterization of SiGe islands, the composition of nanometer-scaled SiGe islands was calculated from the dependence of critical size of shape transition on the Si concentration.
引用
收藏
页码：910 / 912
页数：3
相关论文
共 50 条
  • [21] Composition of self-assembled Ge/Si islands in single and multiple layers
    Schmidt, OG
    Denker, U
    Christiansen, S
    Ernst, F
    APPLIED PHYSICS LETTERS, 2002, 81 (14) : 2614 - 2616
  • [22] Dispersion characteristics of nanometer-scaled silicon rib waveguides
    贾连希
    耿敏明
    张磊
    杨林
    陈平
    刘育梁
    ChineseOpticsLetters, 2010, 8 (05) : 485 - 489
  • [23] Nanometer-scaled dendritic dumbbells: Synthesis and electrochemistry.
    Miller, LL
    Schlechte, JS
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2000, 219 : U384 - U384
  • [24] Dispersion characteristics of nanometer-scaled silicon rib waveguides
    Jia, Lianxi
    Geng, Minming
    Zhang, Lei
    Yang, Lin
    Chen, Ping
    Liu, Yuliang
    CHINESE OPTICS LETTERS, 2010, 8 (05) : 485 - 489
  • [25] Surface plasmon polaritons on metal surfaces with nanometer-scaled roughness
    O'Donnell, KA
    ENGINEERED NANOSTRUCTURAL FILMS AND MATERIALS, 1999, 3790 : 84 - 92
  • [26] Self-assembled SiGe nanoparticles integrated into SOI
    Xu, Wenting
    Tu, Hailing
    Liu, Dali
    Xiao, Qinghua
    Chang, Qing
    MATERIALS LETTERS, 2012, 72 : 39 - 41
  • [27] Growth and photoluminescence of self-assembled islands obtained during the deposition of Ge on a strained SiGe layer
    Lobanov, DN
    Novikov, AV
    Vostokov, NV
    Drozdov, YN
    Yablonskiy, AN
    Krasilnik, ZF
    Stoffel, M
    Denker, U
    Schmidt, OG
    OPTICAL MATERIALS, 2005, 27 (05) : 818 - 821
  • [28] Molecular imprinting of cyclodextrin in water for the recognition of nanometer-scaled guests
    Asanuma, H
    Akiyama, T
    Kajiya, K
    Hishiya, T
    Komiyama, M
    ANALYTICA CHIMICA ACTA, 2001, 435 (01) : 25 - 33
  • [29] Composition redistribution of self-assembled Ge islands on Si (001) during annealing
    Lee, S. W.
    Chang, H. T.
    Lee, C. H.
    Cheng, S. L.
    Liu, C. W.
    THIN SOLID FILMS, 2010, 518 : S196 - S199
  • [30] DNA nanostructures as a nanometer-scaled patterned substrate for controlling cell adhesion
    Fern, J.
    Kim, D.
    Wirtz, D.
    Schulman, R.
    MOLECULAR BIOLOGY OF THE CELL, 2014, 25
12345