Monolithic silicon optocoupler engineering based on tapered waveguides

被引：0
|
作者：
Misiakos, K. [1 ]
Makarona, E. [1 ]
Kitsara, M. [1 ]
Raptis, I. [1 ]
机构：
[1] NCSR Demokritos, Inst Microelect, GR-15310 Athens, Greece
来源：
MICROELECTRONIC ENGINEERING | 2008年 / 85卷 / 5-6期
关键词：
integrated optics; planar waveguides; tapers; coupling; line edge roughness; biosensors; chemosensors;
D O I：
10.1016/j.mee.2007.12.009
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The increased need for further miniaturization of biosensors poses an increased need for the integrated optical fibers to bend, fold or change direction within the biosensor chip. In this work, we explore the effect tapering brings to the coupling efficiency of fibers both theoretically and experimentally. In addition, we also explore and discuss the role of the cladding materials into the efficient stirring of light in conjunction with the tapering geometries used in this study. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：1074 / 1076
页数：3
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