Silicon Based THz Dielectric Waveguides

被引：0

作者：

Xue, Quan ^{[1
]}

Zhu, Haotian

Hui, Jianan

Pang, Stella W.

机构：

[1] City Univ Hong Kong, State Key Lab Millimeter Waves, Ctr Biosyst Neurosci & Nanotechnol, Dept Elect Engn, Hong Kong, Hong Kong, Peoples R China

来源：

2015 ASIA-PACIFIC MICROWAVE CONFERENCE (APMC), VOLS 1-3 | 2015年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, four types of silicon based THz dielectric waveguide are introduced. The silicon based THz dielectric waveguides are all fabricated by DRIE technology. The losses of these dielectric waveguides are very low.

引用

页数：3

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