Multiscale analysis of thermo-fluid phenomena in CVD process

被引：0
|
作者：
Sakiyama, Yukinori [1 ]
机构：
[1] Univ Calif Berkeley, Dept Chem Engn, Berkeley, CA 94720 USA
来源：
JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS | 2007年 / 52卷 / 07期
关键词：
multiscale analysis; ab initio; molecular dynamics; direct simulation Monte Carlo; silicon; CVD;
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
引用
收藏
页码：513 / 518
页数：6
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