Ion current distribution within a toroidal duct of a filtered vacuum arc deposition system

被引：0
|
作者：
Zhitomirsky, VN [1 ]
Boxman, R [1 ]
Goldsmith, S [1 ]
机构：
[1] TEL AVIV UNIV,ELECT DISCHARGE & PLASMA LAB,IL-69978 TEL AVIV,ISRAEL
来源：
ISDEIV - XVIITH INTERNATIONAL SYMPOSIUM ON DISCHARGES AND ELECTRICAL INSULATION IN VACUUM, PROCEEDINGS, VOLS I AND II | 1996年
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：927 / 931
页数：5
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