Ion current distribution within a toroidal duct of a filtered vacuum arc deposition system

被引：0
|
作者：
Zhitomirsky, VN [1 ]
Boxman, R [1 ]
Goldsmith, S [1 ]
机构：
[1] TEL AVIV UNIV,ELECT DISCHARGE & PLASMA LAB,IL-69978 TEL AVIV,ISRAEL
来源：
ISDEIV - XVIITH INTERNATIONAL SYMPOSIUM ON DISCHARGES AND ELECTRICAL INSULATION IN VACUUM, PROCEEDINGS, VOLS I AND II | 1996年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：927 / 931
页数：5
相关论文
共 50 条
  • [1] Ion current distribution within a toroidal duct of a filtered vacuum arc deposition system
    Zhitomirsky, VN
    Boxman, RL
    Goldsmith, S
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 1997, 25 (04) : 665 - 669
  • [2] Ion current distribution in a filtered vacuum arc deposition system
    Zhitomirsky, VN
    Kaplan, L
    Boxman, RL
    Goldsmith, S
    SURFACE & COATINGS TECHNOLOGY, 1995, 76 (1-3): : 190 - 196
  • [3] Macroparticle distribution in a quarter-torus plasma duct of a filtered vacuum arc deposition system
    Keidar, M
    Beilis, II
    Aharonov, R
    Arbilly, D
    Boxman, RL
    Goldsmith, S
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1997, 30 (21) : 2972 - 2978
  • [4] Influence of gas pressure on the ion current and its distribution in a filtered vacuum are deposition system
    Zhitomirsky, VN
    Kinrot, U
    Alterkop, B
    Boxman, RL
    Goldsmith, S
    SURFACE & COATINGS TECHNOLOGY, 1996, 86 (1-3): : 263 - 270
  • [5] Three-dimensional ion distribution in a filtered vacuum arc discharge
    Kelly, H.
    Marquez, A.
    Pirrerao, M.
    PLASMA AND FUSION SCIENCE, 2006, 875 : 254 - +
  • [6] Current distribution on the substrate in a vacuum arc deposition setup
    Baranov, Oleg
    Romanov, Maxim
    PLASMA PROCESSES AND POLYMERS, 2008, 5 (03) : 256 - 262
  • [7] Recent progress in filtered vacuum arc deposition
    Boxman, R.L.
    Zhitomirsky, V.
    Alterkop, B.
    Gidalevich, E.
    Beilis, I.
    Keidar, M.
    Goldsmith, S.
    Surface and Coatings Technology, 1996, 86-87 (1 -3 pt 1): : 243 - 253
  • [8] Recent progress in filtered vacuum arc deposition
    Boxman, RL
    Zhitomirsky, V
    Alterkop, B
    Gidalevich, E
    Beilis, I
    Keidar, M
    Goldsmith, S
    SURFACE & COATINGS TECHNOLOGY, 1996, 86 (1-3): : 243 - 253
  • [9] Vacuum arc plasma jet propagation in a toroidal duct
    Alterkop, B
    Gidalevich, E
    Goldsmith, S
    Boxman, RL
    JOURNAL OF APPLIED PHYSICS, 1996, 79 (09) : 6791 - 6802
  • [10] Ion transport mechanisms in a filtered cathodic vacuum arc (FCVA) system
    Bilek, MMM
    Yin, Y
    McKenzie, DR
    Milne, WI
    ISDEIV - XVIITH INTERNATIONAL SYMPOSIUM ON DISCHARGES AND ELECTRICAL INSULATION IN VACUUM, PROCEEDINGS, VOLS I AND II, 1996, : 962 - 966
12345