RESOLNRA: A new program for optimizing the achievable depth resolution of ion beam analysis methods

被引：49
|
作者：
Mayer, M. [1 ]
机构：
[1] EURATOM, Max Planck Inst Plasmaphysik, D-85748 Garching, Germany
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2008年 / 266卷 / 08期
关键词：
ion beam analysis; computer simulation; depth resolution; SIMNRA; RESOLNRA; RBS; ERDA; NRA; straggling;
D O I：
10.1016/j.nimb.2007.11.071
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The code RESOLNRA for determining the experimental conditions (incident energy and angle) in order to achieve an optimal depth resolution was developed. RESOLNRA is based on the spectrum simulation code SIMNRA. RESOLNRA treats RBS, ERDA and NRA and includes the energy broadening contributions due to electronic energy-loss straggling, geometrical straggling, multiple scattering, absorber foils and detector resolution. Additional constraints, such as minimum or maximum beam energies or tilt angles, or the requirement for a specific energy in a specific depth, can be taken into account. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：1852 / 1857
页数：6
相关论文
共 50 条
  • [1] Ion beam analysis with monolayer depth resolution
    Carstanjen, HD
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1998, 136 : 1183 - 1190
  • [2] Ion beam analysis with monolayer depth resolution
    Carstanjen, HD
    MATERIALS SCIENCE APPLICATIONS OF ION BEAM TECHNIQUES, 1997, 248-2 : 459 - 466
  • [3] Ion beam analysis with monolayer depth resolution
    Carstanjen, H.D.
    Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1998, 136-138 : 1183 - 1190
  • [4] Ion beam analysis with monolayer depth resolution using the electrostatic spectrometer at the MPI Stuttgart
    Plachke, D
    Blohm, G
    Fischer, T
    Khellaf, A
    Kruse, O
    Stoll, H
    Carstanjen, HD
    APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY, 2001, 576 : 458 - 462
  • [5] DEPTH RESOLUTION FACTOR OF A STATIC GAUSSIAN ION-BEAM
    MALHERBE, JB
    SANZ, JM
    HOFMANN, S
    SURFACE AND INTERFACE ANALYSIS, 1981, 3 (06) : 235 - 239
  • [6] THE EFFECT OF ION-BEAM MIXING ON SIMS DEPTH RESOLUTION
    LIKONEN, J
    HAUTALA, M
    KOPONEN, I
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 64 (1-4): : 149 - 152
  • [7] ION-BEAM ANALYSIS FOR DEPTH PROFILING
    KNAPP, JA
    BARBOUR, JC
    DOYLE, BL
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (04): : 2685 - 2690
  • [8] A New Limitation of the Depth Resolution in TOF-SIMS Elemental Profiling: the Influence of a Probing Ion Beam
    M. N. Drozdov
    Yu. N. Drozdov
    A. V. Novikov
    P. A. Yunin
    D. V. Yurasov
    Technical Physics Letters, 2018, 44 : 320 - 323
  • [9] A New Limitation of the Depth Resolution in TOF-SIMS Elemental Profiling: the Influence of a Probing Ion Beam
    Drozdov, M. N.
    Drozdov, Yu. N.
    Novikov, A. V.
    Yunin, P. A.
    Yurasov, D. V.
    TECHNICAL PHYSICS LETTERS, 2018, 44 (04) : 320 - 323
  • [10] Focused ion beam machined nanostructures depth profiled by macrochannelling ion beam analysis
    Orbons, S. M.
    van Dijk, L.
    Bozkurt, M.
    Johnston, P. N.
    Reichart, P.
    Jamieson, D. N.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2006, 249 : 747 - 751
12345