RESOLNRA: A new program for optimizing the achievable depth resolution of ion beam analysis methods

被引：49
|
作者：
Mayer, M. [1 ]
机构：
[1] EURATOM, Max Planck Inst Plasmaphysik, D-85748 Garching, Germany
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2008年 / 266卷 / 08期
关键词：
ion beam analysis; computer simulation; depth resolution; SIMNRA; RESOLNRA; RBS; ERDA; NRA; straggling;
D O I：
10.1016/j.nimb.2007.11.071
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The code RESOLNRA for determining the experimental conditions (incident energy and angle) in order to achieve an optimal depth resolution was developed. RESOLNRA is based on the spectrum simulation code SIMNRA. RESOLNRA treats RBS, ERDA and NRA and includes the energy broadening contributions due to electronic energy-loss straggling, geometrical straggling, multiple scattering, absorber foils and detector resolution. Additional constraints, such as minimum or maximum beam energies or tilt angles, or the requirement for a specific energy in a specific depth, can be taken into account. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：1852 / 1857
页数：6
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