Study on Hole Effective Mass of Strained Si1-xGex/(101)Si

被引:0
|
作者
Song, JianJun [1 ]
Zhang, HeMing [1 ]
Hu, HuiYong [1 ]
Xuan, RongXi [1 ]
Dai, XianYing [1 ]
机构
[1] Xidian Univ, Sch Microelect, Xian, Peoples R China
关键词
strained Si1-xGex; hole effective mass; PMOS; BAND;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Using K.P method with the help of perturbation theory, the arbitrary k wave vector directional hole effective masses in strained Si1-xGex/(101)Si were obtained. It is found that the more obvious anisotropy of the hole effective mass occurs in strained Si1-xGex on (101) Si substrate and that the [010] directional hole effective mass decreases obviously under strain, compared with the one in relaxed Si. The results above can supply valuable references to the design of the Si-based strained PMOS devices
引用
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页码:362 / +
页数:2
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