A MEMS array for pneumatic conveyor and its control based on distributed system

被引：4
|
作者：
Fukuta, Y [1 ]
Chapuis, YA [1 ]
Mita, Y [1 ]
Fujita, H [1 ]
机构：
[1] Univ Tokyo, IIS, Tokyo, Japan
来源：
MEMS 2005 Miami: Technical Digest | 2005年
关键词：
D O I：
10.1109/MEMSYS.2005.1453862
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, a pneumatic conveyor and its control mode are proposed for tiny object manipulation. The conveyor consists of a 2D array of 560 air-nozzle actuators realized by the silicon MEMS technology. A distributed control method, based on local air-flow force application, has been developed and successfully validated. Experimental and characterization results are finally presented and analyzed.
引用
收藏
页码：40 / 43
页数：4
相关论文
共 50 条
  • [41] Airflow MEMS array conveyor which provide clean and contact-free manipulations for microtas
    Fukuta, Y
    Chapuis, YA
    Mita, Y
    Fujita, H
    Micro Total Analysis Systems 2004, Vol 2, 2005, (297): : 404 - 406
  • [42] The Pneumatic Position Control System Based on Fuzzy- PID
    Li, Sheng-zhong
    Liu, Jian-xin
    Xia, Yi-fei
    MATERIALS SCIENCE, CIVIL ENGINEERING AND ARCHITECTURE SCIENCE, MECHANICAL ENGINEERING AND MANUFACTURING TECHNOLOGY, PTS 1 AND 2, 2014, 488-489 : 1142 - 1145
  • [43] Modeling and control of a monopropellant-based pneumatic actuation system
    Barth, EJ
    Gogola, MA
    Goldfarb, M
    2003 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION, VOLS 1-3, PROCEEDINGS, 2003, : 628 - 633
  • [44] PNEUMATIC CONTROL SYSTEM FOR CENTRIFUGES
    TAMM, PH
    CHEMICAL AND PROCESS ENGINEERING, 1971, 52 (07): : 80 - &
  • [45] A Current Conveyor based Field Programmable Analog Array
    Christophe Premont
    Richard Grisel
    Nacer Abouchi
    Jean-Pierre Chante
    Analog Integrated Circuits and Signal Processing, 1998, 17 : 105 - 124
  • [46] Control system for Pneumatic Robot
    Constantin, Victor
    Avram, Mihai
    Miu, Silvia
    Bucşan, Constantin
    Romanian Review Precision Mechanics, Optics and Mechatronics, 2011, (39): : 86 - 89
  • [47] Stimulative simulation system based on distributed control system
    Zhang Fang'e
    ICCSE'2006: PROCEEDINGS OF THE FIRST INTERNATIONAL CONFERENCE ON COMPUTER SCIENCE & EDUCATION: ADVANCED COMPUTER TECHNOLOGY, NEW EDUCATION, 2006, : 148 - 151
  • [48] A current conveyor based field programmable analog array
    Premont, C
    Grisel, R
    Abouchi, N
    Chante, JP
    ANALOG INTEGRATED CIRCUITS AND SIGNAL PROCESSING, 1998, 17 (1-2) : 105 - 124
  • [49] Intelligent position control for pneumatic servo system based on predictive fuzzy control
    Mu, Shenglin
    Goto, Seigo
    Shibata, Satoru
    Yamamoto, Tomonori
    COMPUTERS & ELECTRICAL ENGINEERING, 2019, 75 : 112 - 122
  • [50] Research on Position Tracking Control of Pneumatic System based on Model Predictive Control
    Fan, Yunsheng
    Song, Yuanshuai
    Zhao, Hualin
    2023 35TH CHINESE CONTROL AND DECISION CONFERENCE, CCDC, 2023, : 3404 - 3409
12345