A MEMS array for pneumatic conveyor and its control based on distributed system

被引：4
|
作者：
Fukuta, Y [1 ]
Chapuis, YA [1 ]
Mita, Y [1 ]
Fujita, H [1 ]
机构：
[1] Univ Tokyo, IIS, Tokyo, Japan
来源：
MEMS 2005 Miami: Technical Digest | 2005年
关键词：
D O I：
10.1109/MEMSYS.2005.1453862
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, a pneumatic conveyor and its control mode are proposed for tiny object manipulation. The conveyor consists of a 2D array of 560 air-nozzle actuators realized by the silicon MEMS technology. A distributed control method, based on local air-flow force application, has been developed and successfully validated. Experimental and characterization results are finally presented and analyzed.
引用
收藏
页码：40 / 43
页数：4
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