Development of novel nickel (beta-diketonate)(2)-ligand complexes as precursors for MOCVD of nickel and nickel oxide

被引：0

作者：

Spee, CIMA ^{[1
]}

Linden, HL ^{[1
]}

Mackor, A ^{[1
]}

Timmer, K ^{[1
]}

Meinema, HA ^{[1
]}

机构：

[1] TNO,INST APPL PHYS,DEPT INORGAN MAT CHEM,5600 AN EINDHOVEN,NETHERLANDS

来源：

METAL-ORGANIC CHEMICAL VAPOR DEPOSITION OF ELECTRONIC CERAMICS II | 1996年 / 415卷

关键词：

D O I：

暂无

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：93 / 98

页数：6

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