Development of novel nickel (beta-diketonate)(2)-ligand complexes as precursors for MOCVD of nickel and nickel oxide

被引：0
|
作者：
Spee, CIMA [1 ]
Linden, HL [1 ]
Mackor, A [1 ]
Timmer, K [1 ]
Meinema, HA [1 ]
机构：
[1] TNO,INST APPL PHYS,DEPT INORGAN MAT CHEM,5600 AN EINDHOVEN,NETHERLANDS
来源：
METAL-ORGANIC CHEMICAL VAPOR DEPOSITION OF ELECTRONIC CERAMICS II | 1996年 / 415卷
关键词：
D O I：
暂无
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：93 / 98
页数：6
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