Fast and slow carrier recombination transients in highly excited 4H-and 3C-SiC crystals at room temperature

被引:75
|
作者
Scajev, P. [1 ]
Gudelis, V. [1 ]
Jarasiunas, K. [1 ]
Klein, P. B. [2 ]
机构
[1] Vilnius State Univ, Inst Appl Res, LT-10222 Vilnius, Lithuania
[2] USN, Res Lab, Washington, DC 20375 USA
关键词
AUGER RECOMBINATION; SURFACE RECOMBINATION; ABSORPTION; 4H; 3C; PARAMETERS; LIFETIME; SILICON; 6H;
D O I
10.1063/1.3459894
中图分类号
O59 [应用物理学];
学科分类号
摘要
Nonequilibrium carrier recombination in highly excited epitaxial layers of 4H-SiC and free standing 3C-SiC was analyzed numerically and studied experimentally by the time-resolved free carrier absorption (FCA) technique. The measurement setup combined interband carrier excitation by a picosecond laser pulse and probing of carrier dynamics at excess carrier densities in the Delta N = 10(17)-10(20) cm(-3) range by optically or electronically delayed probe pulses, thus providing temporal resolution of 10 ps and 10 ns, respectively. FCA decay kinetics at different excitation levels and subsequent numerical modeling were used to determine the bulk lifetime, surface recombination velocity, and bimolecular (B) and Auger recombination (C) coefficients at 300 K. Bulk lifetimes of similar to 800 ns and similar to 65 ns were determined in 4H and 3C epitaxial layers, respectively. The numerical fitting of FCA kinetics in the 4H layer provided values of B = (1.2 +/- 0.4) x 10(-12) cm(3)/s and C = (7 +/- 4) x 10(-31) cm(6)/s at lower excitations while the Auger coefficient decreased to C = (0.8 +/- 0.2) x 10(-31) cm(6)/s at Delta N similar to 10(20) cm(-3) due to screening of the Coulomb-enhanced Auger recombination. In 3C crystals, these values were measured to be B = (2.0 +/- 0.5) x 10(-12) cm(3)/s and C = (2.0 +/- 0.5) x 10(-32) cm(6)/s. The tendency for a strongly increased surface recombination rate in 3C at high excitation conditions was observed experimentally and associated with the screening of the surface potential by the high density carrier plasma. (C) 2010 American Institute of Physics. [doi:10.1063/1.3459894]
引用
收藏
页数:9
相关论文
共 50 条
  • [31] LOW-TEMPERATURE PHOTOLUMINESCENCE OF POLYCRYSTALS AND SINGLE-CRYSTALS OF 3C-SIC
    VAKULENKO, YA
    GORBAN, IS
    GUBANOV, VA
    IVANOVA, LM
    PLETYUSHKIN, AA
    UKRAINSKII FIZICHESKII ZHURNAL, 1986, 31 (03): : 344 - 347
  • [32] Carrier recombination in highly Al doped 4H-SiC: dependence on the injection conditions
    Tanaka, Kazuhiro
    Kato, Masashi
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2024, 63 (01)
  • [33] Surface recombination velocities for 4H-SiC: Dependence of excited carrier concentration and surface passivation
    Kato, Masashi
    Ogawa, Ayato
    Han, Lei
    Kato, Tomohisa
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2024, 170
  • [34] Characterization of bulk (111) 3C-SiC single crystals grown on 4H-SiC by the CF-PVT method
    Latu-Romain, L.
    Chaussende, D.
    Balloud, C.
    Juillaguet, S.
    Rapenne, L.
    Pernot, E.
    Camassel, J.
    Pons, M.
    Madar, R.
    SILICON CARBIDE AND RELATED MATERIALS 2005, PTS 1 AND 2, 2006, 527-529 : 99 - 102
  • [35] Investigations of 3C-SiC inclusions in 4H-SiC epilayers on 4H-SiC single crystal substrates
    Weimin Si
    Michael Dudley
    Hua Shuang Kong
    Joe Sumakeris
    Calvin Carter
    Journal of Electronic Materials, 1997, 26 : 151 - 159
  • [36] Investigations of 3C-SiC inclusions in 4H-SiC epilayers on 4H-SiC single crystal substrates
    Si, WM
    Dudley, M
    Kong, HS
    Sumakeris, J
    Carter, C
    JOURNAL OF ELECTRONIC MATERIALS, 1997, 26 (03) : 151 - 159
  • [37] Cathodoluminescence Study of 3C-SiC Epilayers Grown on 4H-SiC Substrates
    Jun Chen
    Hiroyuki Sazawa
    Wei Yi
    Takashi Sekiguchi
    Journal of Electronic Materials, 2023, 52 : 5075 - 5083
  • [38] Observation of 4H-SiC to 3C-SiC polytypic transformation during oxidation
    Okojie, RS
    Xhang, M
    Pirouz, P
    Tumakha, S
    Jessen, G
    Brillson, LJ
    APPLIED PHYSICS LETTERS, 2001, 79 (19) : 3056 - 3058
  • [39] CVD Heteroepitaxial Growth of 3C-SiC on 4H-SiC (0001) Substrates
    Li, Xun
    Leone, Stefano
    Andersson, Sven
    Kordina, Olof
    Henry, Anne
    Janzen, Erik
    SILICON CARBIDE AND RELATED MATERIALS 2011, PTS 1 AND 2, 2012, 717-720 : 189 - 192
  • [40] Structural investigation of heteroepitaxial 3C-SiC grown on 4H-SiC substrates
    Jacobson, Henrik
    Li, Xun
    Janzen, Erik
    Henry, Anne
    SILICON CARBIDE AND RELATED MATERIALS 2012, 2013, 740-742 : 319 - +