Cyclopolymerization in the design of resist materials.

被引：0
|
作者：
Fréchet, JMJ [1 ]
Pasini, D [1 ]
Low, E [1 ]
Meagley, R [1 ]
Niu, J [1 ]
机构：
[1] Univ Calif Berkeley, Dept Chem, Berkeley, CA 94720 USA
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1999年 / 217卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
090-PMSE
引用
收藏
页码：U417 / U417
页数：1
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