High-κ gate dielectrics with ultra-low leakage current for sub-45 nm CMOS

被引：4

作者：

Venkateshan, A. ^{[1
]}

Singh, R.

Poole, K. F.

Harriss, J.

Senter, H.

Teague, R.

Narayan, J.

机构：

[1] Clemson Univ, Dept Elect & Comp Engn, Clemson, SC 29634 USA

[2] Clemson Univ, Dept Math, Clemson, SC 29634 USA

[3] Clemson Univ, Comp & Network Serv, Clemson, SC 29634 USA

[4] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA

来源：

ELECTRONICS LETTERS | 2007年 / 43卷 / 21期

关键词：

D O I：

10.1049/el:20072178

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The results of a new method of high-kappa dielectric formation are reported. For effective oxide thickness of 0.39 nm, the leakage current density of metal-high-kappa-silicon structure is about 1 x 10(-12) A/cm(2) for gate voltage from +3 to -3 V The descriptive statistics and process variation data presented demonstrate that the process is robust and manufacturing tools can be developed without any fundamental barrier.

引用

页码：1130 / 1132

页数：3

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