DC glow discharge for sputtering & biasing

被引：0

作者：

Mattox, DM ^{[1
]}

机构：

[1] Soc Vacuum Coaters, Albuquerque, NM 87122 USA

来源：

PLATING AND SURFACE FINISHING | 2000年 / 87卷 / 12期

关键词：

D O I：

暂无

中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

摘要：

引用

页码：63 / 65

页数：3

共 50 条

[1] LANGMUIR PROBE MEASUREMENTS IN NEGATIVE GLOW OF A SPUTTERING DC DISCHARGE
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