PVD processes: Pulsed DC for sputtering & biasing

被引：0
|
作者：
Mattox, DM [1 ]
机构：
[1] Soc Vacuum Coaters, Albuquerque, NM 87122 USA
来源：
PLATING AND SURFACE FINISHING | 2000年 / 87卷 / 05期
关键词：
D O I：
暂无
中图分类号：
TF [冶金工业];
学科分类号：
0806 ;
摘要：
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页码：122 / 123
页数：2
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