Table-top Soft X-ray Microscopy with a Laser-induced Plasma Source Based on a Pulsed Gas-jet

被引：8

作者：

Mueller, Matthias ^{[1
]}

Mey, Tobias ^{[1
]}

Niemeyer, Juergen ^{[2
]}

Lorenz, Maike ^{[3
]}

Mann, Klaus ^{[1
]}

机构：

[1] Laser Lab Gottingen eV, Hans Adolf Krebs Weg 1, D-37077 Gottingen, Germany

[2] Univ Gottingen, Dept Nutzpflanzenwissensch, Carl Sprengel Weg 1, D-37075 Gottingen, Germany

[3] Univ Gottingen, Expt Phykol & Sammlung Algenkulturen, Nikolausberger Weg 18, D-37073 Gottingen, Germany

来源：

ICXOM23: INTERNATIONAL CONFERENCE ON X-RAY OPTICS AND MICROANALYSIS | 2016年 / 1764卷

关键词：

WATER; TRANSMISSION; EMISSION; TOMOGRAPHY; RESOLUTION;

D O I：

10.1063/1.4961137

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A table-top soft x-ray microscope based on a long-term stable and nearly debris-free laser plasma from a pulsed nitrogen gas jet target is presented. The microscope operates in the "water window" region at 2.88 nm wavelength. The emitted soft x-ray radiation is focused by an ellipsoidal condenser mirror into the object plane and a sample is imaged using a Fresnel zone plate onto a CCD camera. The spatial resolution of the microscope is about 50 nm demonstrated for a Siemens star test pattern.

引用

页数：6

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