Table-top Soft X-ray Microscopy with a Laser-induced Plasma Source Based on a Pulsed Gas-jet

被引:8
|
作者
Mueller, Matthias [1 ]
Mey, Tobias [1 ]
Niemeyer, Juergen [2 ]
Lorenz, Maike [3 ]
Mann, Klaus [1 ]
机构
[1] Laser Lab Gottingen eV, Hans Adolf Krebs Weg 1, D-37077 Gottingen, Germany
[2] Univ Gottingen, Dept Nutzpflanzenwissensch, Carl Sprengel Weg 1, D-37075 Gottingen, Germany
[3] Univ Gottingen, Expt Phykol & Sammlung Algenkulturen, Nikolausberger Weg 18, D-37073 Gottingen, Germany
关键词
WATER; TRANSMISSION; EMISSION; TOMOGRAPHY; RESOLUTION;
D O I
10.1063/1.4961137
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A table-top soft x-ray microscope based on a long-term stable and nearly debris-free laser plasma from a pulsed nitrogen gas jet target is presented. The microscope operates in the "water window" region at 2.88 nm wavelength. The emitted soft x-ray radiation is focused by an ellipsoidal condenser mirror into the object plane and a sample is imaged using a Fresnel zone plate onto a CCD camera. The spatial resolution of the microscope is about 50 nm demonstrated for a Siemens star test pattern.
引用
收藏
页数:6
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