Reducing the substrate losses of RF integrated inductors

被引：26
|
作者：
Mernyei, F [1 ]
Darrer, F
Pardoen, M
Sibrai, A
机构：
[1] Austria Mikro Syst Int AG, Budapest Design Off, H-1135 Budapest, Hungary
[2] Austria Mikro Syst Int AG, Dept Engn, Schloss Premstatten, A-8141 Unterpremstatten, Austria
来源：
IEEE MICROWAVE AND GUIDED WAVE LETTERS | 1998年 / 8卷 / 09期
关键词：
integrated inductor; on-chip spiral; quality factor; substrate loss;
D O I：
10.1109/75.720461
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This letter introduces a new method for reducing the substrate-related losses of integrated spiral inductors for radio frequency (RF) applications. Measurement based equivalent circuit parameters are demonstrated. Using our method the quality factor increased from 5.3 to 6.0 at 3.5 GHz at an 1.8-nH inductor.
引用
收藏
页码：300 / 301
页数：2
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