Capacitive, inductive and helicon-wave modes of operation of a helicon plasma source

被引:138
|
作者
Ellingboe, AR [1 ]
Boswell, RW [1 ]
机构
[1] AUSTRALIAN NATL UNIV, RES SCH PHYS SCI & ENGN, PLASMA RES LAB, CANBERRA, ACT 0200, AUSTRALIA
关键词
D O I
10.1063/1.871713
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Vector-rf-B-field measurements in the near-field of a helicon plasma source taken throughout the volume of the source are reported. Three distinct modes of operation of the helicon plasma source, capacitive, inductive, and helicon-wave, are identified by the structure of the plasma-wave-fields. Results are reported for a double-half-turn antenna, which is believed to be the first reporting for such an antenna structure in application to helicon-wave plasma sources. Comparison is made to a double-saddle-coil antenna which also demonstrates the distinct inductive and helicon-wave modes. (C) 1996 American Institute of Physics.
引用
收藏
页码:2797 / 2804
页数:8
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