Evaluation of Verification Devices with Precise Probe Measurement System in NMIJ

被引：0
|
作者：
Sakamaki, Ryo [1 ]
Horibe, Masahiro [1 ]
机构：
[1] Natl Metrol Inst Japan, Natl Inst Adv Ind Sci & Technol, Umezono 1-1-1, Tsukuba, Ibaraki, Japan
来源：
2016 URSI ASIA-PACIFIC RADIO SCIENCE CONFERENCE (URSI AP-RASC) | 2016年
关键词：
on-wafer measurement; verification device; S-parameter; uncertainty analysis; automatic probing system;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The paper discusses about evaluation of verification devices in on-wafer measurement. To eliminate effect of probe positioning repeatability, an automatic controlled probing system and a position-adjustment system were established. The established systems can reduce operator-derived probe positional errors. Consequently, the verification devices were evaluated with lower uncertainty owing to the systems. It was found that each of the devices exhibited different errors due to different characteristics of device.
引用
收藏
页码：481 / 482
页数：2
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