Evaluation of Verification Devices with Precise Probe Measurement System in NMIJ

被引：0
|
作者：
Sakamaki, Ryo [1 ]
Horibe, Masahiro [1 ]
机构：
[1] Natl Metrol Inst Japan, Natl Inst Adv Ind Sci & Technol, Umezono 1-1-1, Tsukuba, Ibaraki, Japan
来源：
2016 URSI ASIA-PACIFIC RADIO SCIENCE CONFERENCE (URSI AP-RASC) | 2016年
关键词：
on-wafer measurement; verification device; S-parameter; uncertainty analysis; automatic probing system;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The paper discusses about evaluation of verification devices in on-wafer measurement. To eliminate effect of probe positioning repeatability, an automatic controlled probing system and a position-adjustment system were established. The established systems can reduce operator-derived probe positional errors. Consequently, the verification devices were evaluated with lower uncertainty owing to the systems. It was found that each of the devices exhibited different errors due to different characteristics of device.
引用
收藏
页码：481 / 482
页数：2
相关论文
共 50 条
  • [21] PRELIMINARY EVALUATION OF THE PROTOTYPE STEREOSCOPIC ENDOSCOPE - PRECISE 3-DIMENSIONAL MEASUREMENT SYSTEM
    CATALANO, MF
    VANDAM, J
    BEDFORD, R
    COTHREN, RM
    SIVAK, MV
    GASTROINTESTINAL ENDOSCOPY, 1993, 39 (01) : 23 - 28
  • [22] A precise time measurement evaluation board for a radiography system of high-Z materials
    Dou Fei
    Liang Hao
    Zhou Lei
    Zhou Yongzhao
    NUCLEAR SCIENCE AND TECHNIQUES, 2012, 23 (05) : 284 - 288
  • [23] OPTIMUM PROBE DESIGN FOR PRECISE TDC MEASUREMENT USING A MICROWAVE TECHNIQUE
    YAMANAKA, T
    KINOSHITA, M
    JOURNAL OF ENGINEERING FOR GAS TURBINES AND POWER-TRANSACTIONS OF THE ASME, 1991, 113 (03): : 406 - 412
  • [24] Design and evaluation of precise current integrator for scanning probe microscopy
    Raczkowski, Kamil
    Piasecki, Tomasz
    Rudek, Maciej
    Gotszalk, Teodor
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2017, 28 (03)
  • [25] Design, analysis and verification of integrated horn array for fast evaluation of probe-fed antenna measurement setup
    Kong, Shangcheng
    Shen, Yizhu
    Ye, Kai
    Hu, Sanming
    IET MICROWAVES ANTENNAS & PROPAGATION, 2019, 13 (11) : 1788 - 1793
  • [26] Verification of Measurement System for Shearography Machine
    Srisertpol, Jiraphon
    Soonanon, Paphakorn
    Champathong, Preecha
    Khaengkarn, Sorada
    SELECTED TOPICS IN SYSTEM SCIENCE AND SIMULATION IN ENGINEERING, 2010, : 459 - +
  • [27] SYSTEM VERIFICATION AND EVALUATION PROCEDURES
    DELATORE, JP
    VANHAFTEN, D
    WEBER, LA
    BELL SYSTEM TECHNICAL JOURNAL, 1979, 58 (06): : 1335 - 1346
  • [28] Measurement and analysis of parameters of the precise grinding system
    Tyszczuk, Krzysztof
    Peszynski, Kazimierz
    Mrozinski, Adam
    Smigielski, Grzegorz
    XXIII POLISH-SLOVAK SCIENTIFIC CONFERENCE ON MACHINE MODELLING AND SIMULATIONS (MMS 2018), 2019, 254
  • [29] PRECISE STIFFNESS MEASUREMENT SYSTEM FOR MICROMECHANICAL STRUCTURES
    UENISHI, Y
    YASUDA, K
    HARA, S
    INTERNATIONAL JOURNAL OF THE JAPAN SOCIETY FOR PRECISION ENGINEERING, 1992, 26 (02): : 160 - 161
  • [30] LASER MEASUREMENT SYSTEM FOR PRECISE AND FAST POSITIONING
    MORI, S
    AKATSU, T
    MIYAZAKI, C
    OPTICAL ENGINEERING, 1988, 27 (09) : 823 - 829
12345