Analysis and measurement of the non-linear refractive index of SiOxNy using pedestal waveguides

被引：0

作者：

Sierra, Julian H. ^{[1
]}

Carvalho, Daniel O. ^{[2
]}

Samad, Ricardo E. ^{[3
]}

Rangel, Ricardo C. ^{[1
,4
]}

Alayo, Marco, I ^{[1
]}

机构：

[1] Univ Sao Paulo, Polytech Sch, Sao Paulo, Brazil

[2] Sao Paulo State Univ UNESP, Telecommun Dept, Sao Joao De Boa Vista, SP, Brazil

[3] IPEN CNEN SP, Ctr Lasers & Applicat, Sao Paulo, Brazil

[4] Sao Paulo State Technol Coll FATEC, Sao Paulo, Brazil

来源：

2019 34TH SYMPOSIUM ON MICROELECTRONICS TECHNOLOGY AND DEVICES (SBMICRO 2019) | 2019年

基金：

巴西圣保罗研究基金会;

关键词：

optical devices; non-linear photonics; silicon oxynitride; self-phase modulation; non-linear refractive index; integrated photonics; microelectronics;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work, the non-linear refractive index (n(2)) of silicon oxynitride (SiOxNy) is determined, obtaining a value for this material of n(2) = 2.11x10(-19) m(2)/W. The results demonstrate that this material has interesting properties for the development of non-linear optical devices. The paper presents in detail the waveguide fabrication process using the pedestal technique, which allows using different materials since it does not require etching to define the sidewalls of the waveguides. We show the results of the measurement of the n(2) employing the non-linear optical phenomena of Self-Phase Modulation (SPM).

引用

页数：5

共 50 条

[21] Analysis of non-linear multilayer waveguides with Kerr-like permittivities
Ogusu, Kazuhiko, 1600, (21):
[22] Refractive index distribution in the non-linear optical layer of thermally poled oxide glasses
Dussauze, M.
Kamitsos, E. I.
Fargin, E.
Rodriguez, V.
CHEMICAL PHYSICS LETTERS, 2009, 470 (1-3) : 63 - 66
[23] Effective non-linear coefficients of optical waveguides
Grant, RS
OPTICAL AND QUANTUM ELECTRONICS, 1996, 28 (09) : 1161 - 1173
[24] EMPIRICAL RELATIONSHIPS FOR PREDICTING NON-LINEAR REFRACTIVE-INDEX CHANGES IN OPTICAL SOLIDS
BOLING, NL
GLASS, AJ
OWYOUNG, A
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1978, 14 (08) : 601 - 608
[25] NON-LINEAR REFRACTIVE-INDEX OF SEMICONDUCTOR AT CONDITIONS OF MANY-PHOTON RESONANCE
ARUTYUNYAN, SI
FIZIKA TVERDOGO TELA, 1978, 20 (01): : 270 - 271
[26] AN INFLUENCE OF LONGITUDINAL INHOMOGENEITY OF THE NON-LINEAR CRYSTAL REFRACTIVE-INDEX ON PARAMETRIC GAIN
ITSKHOKI, IY
KASHINTSEV, MA
LYSOI, BG
SOLOVYOV, AA
KVANTOVAYA ELEKTRONIKA, 1982, 9 (06): : 1185 - 1193
[27] Refractive index measurement of optical waveguides using modified end-fire coupling method
Tsai, Wan-Shao
Piao, Sheng-Chieh
Wei, Pei-Kuen
OPTICS LETTERS, 2011, 36 (11) : 2008 - 2010
[28] Error analysis on the refractive index measurement through using polarization
Beijing Inst of Machinery Industry, Beijing, China
Guangxue Jishu, 4 (48-49, 38):
[29] Non-linear propagation of Gaussian beams in planar graded-index waveguides: a variational approach
Michinel, H.
Pure and applied optics, 1995, 4 (06): : 701 - 708
[30] Analysis of non-linear refractive index influences on four-wave mixing conversion efficiency in semiconductor optical amplifiers
Hosseini, S. R.
Razaghi, M.
Das, N. K.
OPTICS AND LASER TECHNOLOGY, 2012, 44 (03): : 528 - 533

← 1 2 3 4 5 →