Design of microsensor for gases and liquids flow measurements

被引：9
|
作者：
Rodrigues, RJ
Furlan, R
机构：
[1] Univ Sao Paulo, Escola Politecn, Lab Sistemas Integraveis, BR-05508900 Sao Paulo, Brazil
[2] Univ Puerto Rico Humacao, Dept Phys & Elect, Humacao, PR 00791 USA
来源：
MICROELECTRONICS JOURNAL | 2003年 / 34卷 / 5-8期
关键词：
microsensors; flow microsensors; fabrication; microcalorimetric;
D O I：
10.1016/S0026-2692(03)00108-3
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this work we propose a new thermal microsensor for gases and liquids flow measurements that is being implemented by using Micro-Electro-Mechanical-Systems technology. This device measures flow based on calorimetric and time-of-flight principles with six freestanding microfilaments working as thermoresistive elements. The fabrication sequence and layout of the sensor are described and initial results of dynamic simulations are presented. A good qualitative agreement is observed in comparison with the results obtained with an analytical model. (C) 2003 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码：709 / 711
页数：3
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