Design of microsensor for gases and liquids flow measurements

被引：9
|
作者：
Rodrigues, RJ
Furlan, R
机构：
[1] Univ Sao Paulo, Escola Politecn, Lab Sistemas Integraveis, BR-05508900 Sao Paulo, Brazil
[2] Univ Puerto Rico Humacao, Dept Phys & Elect, Humacao, PR 00791 USA
来源：
MICROELECTRONICS JOURNAL | 2003年 / 34卷 / 5-8期
关键词：
microsensors; flow microsensors; fabrication; microcalorimetric;
D O I：
10.1016/S0026-2692(03)00108-3
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this work we propose a new thermal microsensor for gases and liquids flow measurements that is being implemented by using Micro-Electro-Mechanical-Systems technology. This device measures flow based on calorimetric and time-of-flight principles with six freestanding microfilaments working as thermoresistive elements. The fabrication sequence and layout of the sensor are described and initial results of dynamic simulations are presented. A good qualitative agreement is observed in comparison with the results obtained with an analytical model. (C) 2003 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码：709 / 711
页数：3
相关论文
共 50 条
  • [11] MICROSENSOR DETECTS HAZARDOUS GASES.
    Krieger, James
    Chemical and Engineering News, 1988, 66 (16):
  • [12] Vibrational energy flow and chemical reactions in gases and liquids
    Crim, F. Fleming
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2009, 238
  • [13] SMA MICRO PUMP CHIP TO FLOW LIQUIDS AND GASES
    Ikuta, Koji
    Hasegawa, Tadahiro
    Adachi, Takao
    SMST-2007: PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON SHAPE MEMORY AND SUPERELASTIC TECHNOLOGIES, 2008, : 343 - 350
  • [14] MEASUREMENT OF FLOW OF LIQUIDS + GASES USING RADIOACTIVE ISOTOPES
    CLAYTON, CG
    JOURNAL OF THE BRITISH NUCLEAR ENERGY SOCIETY, 1964, 3 (04): : 252 - &
  • [15] A micro flow sensor from a polymer for gases and liquids
    Ahrens, R.
    Schlote-Holubek, K.
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2009, 19 (07)
  • [16] SIMPLE NEEDLE VALVE FOR CONTROLLING THE FLOW OF GASES AND LIQUIDS
    STEPHENS, RL
    CHEMISTRY & INDUSTRY, 1950, (34) : 637 - 637
  • [17] PROPERTIES OF LIQUIDS AND GASES FOR PROCESS DESIGN - CONFERENCE REPORT
    BEVERIDG.GS
    CHEMICAL AND PROCESS ENGINEERING, 1968, 49 (06): : 105 - &
  • [18] Design and construction of an equipment for the determination of solubility of gases in liquids
    Garzon, Luis C. A.
    Romero, Carmen M.
    Suarez, Andres F.
    AICHE JOURNAL, 2017, 63 (07) : 3105 - 3109
  • [19] Microsensor for in situ flow measurements in benthic boundary layers at submillimeter resolution with extremely slow flow
    Brand, Andreas
    Muller, Beat
    Wuest, Alfred
    Dinkel, Christian
    Revsbech, Niels Peter
    Nielsen, Lars Peter
    Pedersen, Ole
    Damgaard, Lars Riis
    Larsen, Lars Hauer
    Wehrli, Bernhard
    LIMNOLOGY AND OCEANOGRAPHY-METHODS, 2007, 5 : 185 - 191
  • [20] A NEW MICROSENSOR FOR ENVIRONMENTAL MEASUREMENTS
    ACCORSI, A
    DELAPIERRE, G
    VAUCHIER, C
    CHARLOT, D
    SENSORS AND ACTUATORS B-CHEMICAL, 1991, 4 (3-4) : 539 - 543
12345