Design of microsensor for gases and liquids flow measurements

In this work we propose a new thermal microsensor for gases and liquids flow measurements that is being implemented by using Micro-Electro-Mechanical-Systems technology. This device measures flow based on calorimetric and time-of-flight principles with six freestanding microfilaments working as thermoresistive elements. The fabrication sequence and layout of the sensor are described and initial results of dynamic simulations are presented. A good qualitative agreement is observed in comparison with the results obtained with an analytical model. (C) 2003 Elsevier Science Ltd. All rights reserved.