Introduction to applications and industries for microelectromechanical systems (MEMS)

被引：0
|
作者：
Walraven, JA [1 ]
机构：
[1] Sandia Natl Labs, Albuquerque, NM 87185 USA
来源：
INTERNATIONAL TEST CONFERENCE 2003, PROCEEDINGS | 2003年
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Microelectromechanical Systems (MEMS) have gained acceptance as viable products for many commercial and government applications. MEMS are currently being used as displays for digital projection systems, sensors for airbag deployment systems, inkjet print head systems, and optical routers. This paper will discuss current and future MEMS applications.
引用
收藏
页码：674 / 680
页数：7
相关论文
共 50 条
  • [41] Total dose effects on microelectromechanical systems (MEMS): Accelerometers
    Lee, CI
    Johnston, AH
    Tang, WC
    Barnes, CE
    Lyke, J
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1996, 43 (06) : 3127 - 3132
  • [42] Reconfigurable hydrophobic/hydrophilic surfaces in microelectromechanical systems (MEMS)
    Deval, J
    Umali, TA
    Lan, EH
    Dunn, B
    Ho, CM
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2004, 14 (01) : 91 - 95
  • [43] U-sequence in electrostatic microelectromechanical systems (MEMS)
    De, Sudipto K.
    Aluru, N. R.
    PROCEEDINGS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 2006, 462 (2075): : 3435 - 3464
  • [44] Micromachines - An Open Access Journal on Microelectromechanical Systems (MEMS)
    Elwenspoek, Miko
    MICROMACHINES, 2010, 1 (02): : 34 - 35
  • [45] Embedded microelectromechanical systems (MEMS) for measuring strain in composites
    Hautamaki, C
    Zurn, S
    Mantell, SC
    Polla, DL
    JOURNAL OF REINFORCED PLASTICS AND COMPOSITES, 2000, 19 (04) : 268 - 277
  • [46] Development of Microelectromechanical Systems (MEMS) forceps for intraocular surgery
    Bhisitkul, RB
    Keller, CG
    BRITISH JOURNAL OF OPHTHALMOLOGY, 2005, 89 (12) : 1586 - 1588
  • [47] Optical deflection measurement for characterization of microelectromechanical systems (MEMS)
    Firebaugh, SL
    Charles, HK
    Edwards, RL
    Keeney, AC
    Wilderson, SF
    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2004, 53 (04) : 1047 - 1051
  • [48] Computer-aided design for microelectromechanical systems (MEMS)
    Lee, YC
    McCarthy, B
    Diao, J
    Zhang, Z
    Harsh, KF
    INTERNATIONAL JOURNAL OF MATERIALS & PRODUCT TECHNOLOGY, 2003, 18 (4-6): : 356 - 380
  • [49] Cellulose nanocrystal (CNC) microelectromechanical systems (MEMS) for biosensing
    Saha, Partha
    Ashurst, Robert
    Davis, Virginia
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2018, 255
  • [50] Experimental adaptation of model parameters for microelectromechanical systems (MEMS)
    Kurth, S
    Dotzel, W
    SENSORS AND ACTUATORS A-PHYSICAL, 1997, 62 (1-3) : 760 - 764
12345