Introduction to applications and industries for microelectromechanical systems (MEMS)

被引：0
|
作者：
Walraven, JA [1 ]
机构：
[1] Sandia Natl Labs, Albuquerque, NM 87185 USA
来源：
INTERNATIONAL TEST CONFERENCE 2003, PROCEEDINGS | 2003年
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Microelectromechanical Systems (MEMS) have gained acceptance as viable products for many commercial and government applications. MEMS are currently being used as displays for digital projection systems, sensors for airbag deployment systems, inkjet print head systems, and optical routers. This paper will discuss current and future MEMS applications.
引用
收藏
页码：674 / 680
页数：7
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