A self-consistent global model of solenoidal-type inductively coupled plasma discharges including the effects of radio-frequency bias power

被引：32

作者：

Kwon, D. C. ^{[1
]}

Chang, W. S. ^{[1
]}

Park, M. ^{[2
]}

You, D. H. ^{[3
]}

Song, M. Y. ^{[1
]}

You, S. J. ^{[4
]}

Im, Y. H. ^{[5
]}

Yoon, J. -S. ^{[1
]}

机构：

[1] Natl Fus Res Inst, Convergence Plasma Res Ctr, Taejon 305333, South Korea

[2] Korea Adv Inst Sci & Technol, Dept Phys, Taejon 305701, South Korea

[3] Kyoungwon Tech Inc, Songnam 462806, South Korea

[4] Korea Res Inst Stand & Sci, Ctr Vacuum Technol, Taejon 305340, South Korea

[5] Chonbuk Natl Univ, Div Chem Engn, Jeonju 561756, South Korea

来源：

JOURNAL OF APPLIED PHYSICS | 2011年 / 109卷 / 07期

关键词：

CAPACITIVE RF SHEATH; ENERGY-DISTRIBUTION; DYNAMICS; REACTORS; DENSITY; TRANSITION;

D O I：

10.1063/1.3572264

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We developed a self-consistent global simulator of solenoidal-type inductively coupled plasma discharges and observed the effect of the radio-frequency (rf) bias power on the plasma density and the electron temperature. We numerically solved a set of spatially averaged fluid equations for charged particles, neutrals, and radicals. Absorbed power by electrons is determined by using an analytic electron heating model including the anomalous skin effect. To analyze the effects of rf bias power on the plasma properties, our model also combines the electron heating and global transport modules with an rf sheath module in a self-consistent manner. The simulation results are compared with numerical results by using the commercial software package CFD-ACE+ (ESI group) and experimental measurements by using a wave cutoff probe and a single Langmuir probe. (C) 2011 American Institute of Physics. [doi:10.1063/1.3572264]

引用

页数：8

共 50 条

[31] Hybrid model of radio-frequency low-pressure inductively coupled plasma discharge with self-consistent electron energy distribution and 2D electric field distribution
Yang, Wei
Wang, You-Nian
PLASMA PHYSICS AND CONTROLLED FUSION, 2021, 63 (03)
[32] Self-consistent global model with multi-step ionizations in inductively coupled plasmas
Lee, MH
Chung, CW
PHYSICS OF PLASMAS, 2005, 12 (07) : 1 - 5
[33] EFFECTS OF PARTICLE LOADING ON A REDUCED PRESSURE INDUCTIVELY COUPLED RADIO-FREQUENCY PLASMA TORCH
WEI, DY
FAROUK, B
APELIAN, D
METALLURGICAL TRANSACTIONS B-PROCESS METALLURGY, 1989, 20 (06): : 949 - 958
[34] MODIFICATION OF A PLASMA-THERM INDUCTIVELY COUPLED PLASMA SUPPLY TO ENABLE RADIO-FREQUENCY POWER MODULATION
ENSMAN, RE
CARR, JW
HIEFTJE, GM
APPLIED SPECTROSCOPY, 1983, 37 (06) : 571 - 573
[35] Self-consistent non-linear radio-frequency wave propagation and peripheral plasma biasing
Jacquot, J.
Colas, L.
Heuraux, S.
Kubic, M.
Gunn, J. P.
Faudot, E.
Hillairet, J.
Goniche, M.
RADIO FREQUENCY POWER IN PLASMAS: PROCEEDINGS OF THE 19TH TOPICAL CONFERENCE, 2011, 1406
[36] Electrostatic probe diagnostics of a planar-type radio-frequency inductively coupled oxygen plasma
Seo, DC
Chung, TH
Yoon, HJ
Kim, GH
JOURNAL OF APPLIED PHYSICS, 2001, 89 (08) : 4218 - 4223
[37] Effects of impedance matching network on the discharge mode transitions in a radio-frequency inductively coupled plasma
Ding, Z. F.
Yuan, G. Y.
Gao, W.
Sun, J. C.
PHYSICS OF PLASMAS, 2008, 15 (06)
[38] A hybrid model of radio frequency biased inductively coupled plasma discharges: description of model and experimental validation in argon
Wen, De-Qi
Liu, Wei
Gao, Fei
Lieberman, M. A.
Wang, You-Nian
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2016, 25 (04):
[39] Self-consistent global model for inductively coupled Cl2 plasma:: Comparison with experimental data and application for the etch process analysis
Efremov, A. M.
Kim, Gwan-Ha
Kim, Jong-Gyu
Kim, Chang-Il
THIN SOLID FILMS, 2007, 515 (13) : 5395 - 5402
[40] Effects of magnetic field on pulse wave forms in plasma immersion ion implantation in a radio-frequency, inductively coupled plasma
Tong, Honghui
Fu, Ricky K. Y.
Tang, Deli
Zeng, Xuchu
Chu, Paul K.
Tong, H., 1600, American Institute of Physics Inc. (92):

← 1 2 3 4 5 →