Evaluation of dislocation densities in HgCdTe films by high resolution X-ray diffraction

The dislocation densities in HgCdTe films grown on CdZnTe by Liquid Phase Epitaxy (LPE) are calculated based on their effects on the x-ray rocking curves. The dislocation densities derived from three kinds of methods, i.e. FWHM of X-ray double axis diffraction, Williamson-Hall plot and Pseudo-Voigt function, are approximately the same. It is found that the thickness of HgCdTe epilayers about 10 mu m is large enough so that effect of crystallize size on the rocking curves width can be ignored. Because the intrinsic FWHM of HgCdTe and the instrumental function of high resolution X-ray diffraction are neglected in Williamson-Hall plot and Pseudo-Voigt function, the dislocation densities obtained by these methods are a little larger than those derived from the first kind of method. Among three kinds of methods, Pseudo-Voigt function method is the easiest one to fit the rocking curves and calculate the dislocation densities.