A method of dynamic chromatic aberration correction in low-voltage scanning electron microscopes

被引：2
|
作者：
Khursheed, A [1 ]
机构：
[1] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore
来源：
ULTRAMICROSCOPY | 2005年 / 103卷 / 04期
关键词：
time-of-flight spectrometer; chromatic aberration; low-voltage scanning electron microscope;
D O I：
10.1016/j.ultramic.2004.12.005
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
A time-of-flight concept that dynamically corrects for chromatic aberration effects in scanning electron microscopes (SEMs) is presented. The method is predicted to reduce the microscope's chromatic aberration by an order of magnitude. The scheme should significantly improve the spatial resolution of low-voltage scanning electron microscopes (LVSEMs). The dynamic means of correcting for chromatic aberration also allows for the possibility of obtaining high image resolution from electron guns that have relatively large energy spreads. (c) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码：255 / 260
页数：6
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