Electrostatically actuated 1 x 2 micromechanical optic switch

被引：8

作者：

Shubin, I ^{[1
]}

Wa, PLK ^{[1
]}

机构：

[1] Univ Cent Florida, Sch Opt, CREOL, Orlando, FL 32816 USA

来源：

ELECTRONICS LETTERS | 2001年 / 37卷 / 07期

关键词：

D O I：

10.1049/el:20010301

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A micro-opto-mechanical 1 x 2 switch has been realised using silicon oxynitride (SiON) planar waveguide technology. The operational principle of the switch is based on the mechanical deflection of a cantilever beam due to electrostatic interaction. The device concept and performance is reported. The switch is monolithically integrated on a silicon substrate and has many; potential applications in fibre-optic local area networks.

引用

页码：451 / 452

页数：2

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