Electrostatically actuated 1 x 2 micromechanical optic switch

被引：8
|
作者：
Shubin, I [1 ]
Wa, PLK [1 ]
机构：
[1] Univ Cent Florida, Sch Opt, CREOL, Orlando, FL 32816 USA
来源：
ELECTRONICS LETTERS | 2001年 / 37卷 / 07期
关键词：
D O I：
10.1049/el:20010301
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A micro-opto-mechanical 1 x 2 switch has been realised using silicon oxynitride (SiON) planar waveguide technology. The operational principle of the switch is based on the mechanical deflection of a cantilever beam due to electrostatic interaction. The device concept and performance is reported. The switch is monolithically integrated on a silicon substrate and has many; potential applications in fibre-optic local area networks.
引用
收藏
页码：451 / 452
页数：2
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