A 3-D FEM based extractor for MEMS inductor with Monte-Carlo sampling

被引：2
|
作者：
Pande, Rajesh S. [1 ]
Jalgaonkar, Anoop [2 ]
Patrikar, Rajendra M. [1 ]
机构：
[1] Visvesvaraya Natl Inst Technol, Nagpur, Maharashtra, India
[2] Shri Ramdeobaba Kamla Nehru Engn Coll, Nagpur, Maharashtra, India
来源：
PROCEEDINGS OF THE 2007 INTERNATIONAL WORKSHOP ON THE PHYSICS OF SEMICONDUCTOR DEVICES: IWPSD-2007 | 2007年
关键词：
Finite Element Method; inductance; microelectromechanical devices; rough surface;
D O I：
10.1109/IWPSD.2007.4472619
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An extraction tool developed with advanced algorithm to compute MEMS (Micro Electro Mechanical System) inductance is presented. The algorithm is based on solution of Laplace equation by Finite Element Method followed by current density computation. The energy (of resulting magnetic field is estimated by Monte Carlo sampling. The extractor developed estimates precisely the inductance offered by MEMS inductor. The impact of micro surface roughness on the estimation of components is a concern because of surface to volume ratio increasing with scaling. The tool demonstrates the impact of micro surface roughness on the estimation of inductance.
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页码：710 / +
页数：2
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