A 3-D FEM based extractor for MEMS inductor with Monte-Carlo sampling

被引：2
|
作者：
Pande, Rajesh S. [1 ]
Jalgaonkar, Anoop [2 ]
Patrikar, Rajendra M. [1 ]
机构：
[1] Visvesvaraya Natl Inst Technol, Nagpur, Maharashtra, India
[2] Shri Ramdeobaba Kamla Nehru Engn Coll, Nagpur, Maharashtra, India
来源：
PROCEEDINGS OF THE 2007 INTERNATIONAL WORKSHOP ON THE PHYSICS OF SEMICONDUCTOR DEVICES: IWPSD-2007 | 2007年
关键词：
Finite Element Method; inductance; microelectromechanical devices; rough surface;
D O I：
10.1109/IWPSD.2007.4472619
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An extraction tool developed with advanced algorithm to compute MEMS (Micro Electro Mechanical System) inductance is presented. The algorithm is based on solution of Laplace equation by Finite Element Method followed by current density computation. The energy (of resulting magnetic field is estimated by Monte Carlo sampling. The extractor developed estimates precisely the inductance offered by MEMS inductor. The impact of micro surface roughness on the estimation of components is a concern because of surface to volume ratio increasing with scaling. The tool demonstrates the impact of micro surface roughness on the estimation of inductance.
引用
收藏
页码：710 / +
页数：2
相关论文
共 50 条
  • [21] BREMSSTRAHLUNG SPECTRA SAMPLING FOR MONTE-CARLO SIMULATIONS
    MORIN, RL
    RAESIDE, DE
    PHYSICS IN MEDICINE AND BIOLOGY, 1982, 27 (02): : 223 - 228
  • [22] SAMPLING ALGORITHMS FOR MONTE-CARLO CALCULATIONS ON LIQUIDS
    OWICKI, JC
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1978, 175 (MAR): : 15 - 15
  • [23] MONTE-CARLO SAMPLING OF SOLUTIONS TO INVERSE PROBLEMS
    MOSEGAARD, K
    TARANTOLA, A
    JOURNAL OF GEOPHYSICAL RESEARCH-SOLID EARTH, 1995, 100 (B7) : 12431 - 12447
  • [24] COMMENTS ON ADJOINT MONTE-CARLO SAMPLING TECHNIQUES
    LEVITT, LB
    SPANIER, J
    NUCLEAR SCIENCE AND ENGINEERING, 1970, 42 (01) : 118 - &
  • [25] 3-D Monte-Carlo neutron transport code MCMG-II and benchmark tests
    Laboratory of Computational Physics, Institute of Applied Physics and Computational Mathematics, Beijing 100094, China
    Yuanzineng Kexue Jishu, 2009, SUPPL. 1 (32-36): : 32 - 36
  • [26] A MONTE-CARLO CORRECTION FOR THE EFFECT OF COMPTON-SCATTERING IN 3-D PET BRAIN IMAGING
    LEVIN, CS
    DAHLBOM, M
    HOFFMAN, EJ
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1995, 42 (04) : 1181 - 1185
  • [27] SIMPLIFIED SAMPLING IN QUANTUM MONTE-CARLO - APPLICATION TO H-3(+)
    ANDERSON, JB
    JOURNAL OF CHEMICAL PHYSICS, 1987, 86 (05): : 2839 - 2843
  • [28] Suitability about FEM Standard on AS/RS with Monte-Carlo Simulation
    Zhao N.
    Luo X.
    Li W.
    Yuan Z.
    Zhongguo Jixie Gongcheng/China Mechanical Engineering, 2020, 31 (18): : 2153 - 2160
  • [29] FEM simulation on the structural reliability of beam pumping unit based on the methods of Monte-Carlo
    Yang, Xiujuan
    Yan, Yongli
    Xu, Zhiqian
    Yan, Xiangzhen
    MECHANICAL ENGINEERING AND GREEN MANUFACTURING, PTS 1 AND 2, 2010, : 820 - +
  • [30] 3-D multigroup P5 Monte-Carlo neutron transport code MCMG and tests
    Deng, Li
    Hu, Ze-Hua
    Li, Gang
    Li, Shu
    Yuanzineng Kexue Jishu/Atomic Energy Science and Technology, 2011, 45 (08): : 943 - 948
12345