Wireless digital pressure gauge based on nanomaterials

被引:0
|
作者
Abay, Dilyara [1 ]
Otarbay, Zhuldyz [1 ]
Token, Madengul [1 ]
Guseinov, Nazim [1 ]
Muratov, Mukhit [1 ]
Gabdullin, Maratbek [1 ]
Ismailov, Daniyar [1 ]
机构
[1] Al Farabi Kazakh Natl Univ, Natl Nanotechnol Lab Open Type, Alma Ata 050040, Kazakhstan
关键词
resistive strain gauge; nanostructured films; nickel copper alloy; digital pressure gauge;
D O I
10.1088/1742-6596/987/1/012032
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In the article studies the efficiency of using nanostructured nickel copper films as thin films for bending sensors. Thin films of nickel-copper alloy were deposited using magnetron sputtering technology followed by the appropriate masks. Scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy (EDS) techniques were used to examine structure and surface of the Ni Cu coatings. The results of the bending sensors result indicated that the Ni Cu thin film strain gauge showed an excellent sensitive.
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页数:5
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