Wireless digital pressure gauge based on nanomaterials

被引：0

作者：

Abay, Dilyara ^{[1
]}

Otarbay, Zhuldyz ^{[1
]}

Token, Madengul ^{[1
]}

Guseinov, Nazim ^{[1
]}

Muratov, Mukhit ^{[1
]}

Gabdullin, Maratbek ^{[1
]}

Ismailov, Daniyar ^{[1
]}

机构：

[1] Al Farabi Kazakh Natl Univ, Natl Nanotechnol Lab Open Type, Alma Ata 050040, Kazakhstan

来源：

APPLIED NANOTECHNOLOGY AND NANOSCIENCE INTERNATIONAL CONFERENCE 2017 (ANNIC 2017) | 2018年 / 987卷

关键词：

resistive strain gauge; nanostructured films; nickel copper alloy; digital pressure gauge;

D O I：

10.1088/1742-6596/987/1/012032

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In the article studies the efficiency of using nanostructured nickel copper films as thin films for bending sensors. Thin films of nickel-copper alloy were deposited using magnetron sputtering technology followed by the appropriate masks. Scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy (EDS) techniques were used to examine structure and surface of the Ni Cu coatings. The results of the bending sensors result indicated that the Ni Cu thin film strain gauge showed an excellent sensitive.

引用

页数：5

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