Autonomous calibration method of the reference flat surface of an interferometer without using a standard flat surface

被引：15

作者：

Fujimoto, Ikumatsu ^{[1
]}

Takatsuji, Toshiyuki ^{[2
]}

Nishimura, Kunitoshi ^{[3
]}

Kim, Min Young ^{[4
]}

机构：

[1] Okuwa Tech Res Ctr, Kazo, Saitama 3470032, Japan

[2] Natl Inst Adv Ind Sci & Technol, Natl Metrol Inst Japan NMIJ, Tsukuba, Ibaraki 3058568, Japan

[3] Mizukoshi Keiki Co Ltd, Nakahara Ku, Mitaka, Tokyo 1810005, Japan

[4] Kyungpook Natl Univ, Sch Elect Engn, IT Coll, Taegu 702701, South Korea

来源：

APPLIED OPTICS | 2012年 / 51卷 / 20期

关键词：

D O I：

10.1364/AO.51.004754

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An autonomous method for calibrating the reference flat surface of an interferometer is proposed with the uncertainty analysis. The method consists of three phases; the first step is multiple rotating shifts of a specimen, the second is a linear shift, and the last is multiple rotating shifts again. The profile of the reference flat surface is basically determined by the linear shift. The linear shift errors that occurred during the linear shift are identified by the rotating shifts. The rotating shift errors caused by the rotating shifts can be compensated and the residual uncertainty can be reduced in proportion to the square root of the number of rotating shifts per one revolution. Finally, the uncertainty analysis is carried out in detail. (C) 2012 Optical Society of America

引用

页码：4754 / 4767

页数：14

共 50 条

[31] Flat Optics for Surface Waves
Martini, Enrica
Mencagli, Mario, Jr.
Gonzalez-Ovejero, David
Maci, Stefano
IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION, 2016, 64 (01) : 155 - 166
[32] DUALITY IN FLAT COHOMOLOGY OF A SURFACE
MILNE, JS
ANNALES SCIENTIFIQUES DE L ECOLE NORMALE SUPERIEURE, 1976, 9 (02): : 171 - 201
[33] Using surface impedance for calculating wakefields in flat geometry
Bane, Karl
Stupakov, Gennady
PHYSICAL REVIEW SPECIAL TOPICS-ACCELERATORS AND BEAMS, 2015, 18 (03):
[34] Flat roof surface temperature assessment using IRT
Simoes, N.
Serra, C.
Simoes, I.
14TH QUANTITATIVE INFRARED THERMOGRAPHY CONFERENCE, 2018, : 418 - 419
[35] Flat surface reconstruction using minimal sonar readings
Henderson, TC
Dekhil, M
Bruderlin, B
Schenkat, L
Veigel, L
IMAGE UNDERSTANDING WORKSHOP, 1996 PROCEEDINGS, VOLS I AND II, 1996, : 995 - 1000
[36] Topological phases and surface flat bands in superconductors without inversion symmetry
Schnyder, Andreas P.
Ryu, Shinsei
PHYSICAL REVIEW B, 2011, 84 (06)
[37] METHOD TO ESTIMATE CONTACT-ANGLE OF A DROP SPREAD UPON A FLAT SURFACE WHEN DROP IS OTHERWISE TOO FLAT TO MEASURE EAD UPON A FLAT SURFACE WHEN DROP IS OTHERWISE TOO FLAT TO MEASURE
WESTON, JP
REPORT OF NRL PROGRESS, 1976, (APR): : 28 - 28
[38] Flat measurement method without high precision adjustment of tested flat
Zhang P.
Zhao W.
Yang S.
Qiu L.
Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2019, 40 (05): : 43 - 50
[39] Method of Using Flat Plate as Calibration Tool for Robot Tool Center Point Calibration
Han F.
Li P.
Tan D.
Li D.
Shao D.
Yan H.
Xinan Jiaotong Daxue Xuebao/Journal of Southwest Jiaotong University, 2020, 55 (01): : 60 - 67
[40] Absolute interferometric testing of a flat surface based on the Laplacian method
Soltani, Peyman
Darudi, Ahmad
OPTICS LETTERS, 2020, 45 (11) : 3026 - 3029

← 1 2 3 4 5 →