Effects of the erosion zone of magnetron sputtering targets on the spatial distribution of structural and electrical properties of transparent conductive Al-doped ZnO polycrystalline films (vol 124, 065304, 2018)

被引：0
|
作者：
Nomoto, Junichi [1 ]
Makino, Hisao [1 ]
Inaba, Katsuhiko [2 ]
Kobayashi, Shintaro [2 ]
Yamamoto, Tetsuya [1 ]
机构：
[1] Kochi Univ Technol, Res Inst, 185 Miyanokuchi, Kochi 7828502, Japan
[2] Rigaku Corp, Xray Res Lab, 3-9-12 Matsubara, Akishima, Tokyo 1968666, Japan
来源：
JOURNAL OF APPLIED PHYSICS | 2019年 / 125卷 / 02期
关键词：
D O I：
10.1063/1.5086316
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页数：1
相关论文
共 50 条
  • [31] Characteristics of the orientation distribution and carrier transport of polycrystalline Al-doped ZnO films prepared by direct current magnetron sputtering
    Nomoto, Junichi
    Makino, Hisao
    Yamamoto, Tetsuya
    THIN SOLID FILMS, 2017, 644 : 33 - 40
  • [32] Microstructure and Optical and Electrical Properties of Al-Doped ZnO Thin Films Prepared by RF Magnetron Sputtering Method
    Xu Shaoliang
    Pang Xiaolu
    Yang Huisheng
    Zhang Boping
    RARE METAL MATERIALS AND ENGINEERING, 2011, 40 : 451 - 454
  • [33] Effects of secondary magnetic field on the properties of Al-doped ZnO films prepared by RF magnetron sputtering
    Chen, Ming
    Zhou, Xiying
    Shao, Jiajia
    Mao, Xiujuan
    Yang, Guoliang
    CERAMICS INTERNATIONAL, 2014, 40 (09) : 14347 - 14353
  • [34] Effects of in situ annealing on the properties of Al-doped ZnO thin films deposited by RF magnetron sputtering
    Kim, Deok-Kyu
    Park, Choon-Bae
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2014, 25 (04) : 1589 - 1595
  • [35] Discharge power dependence of structural and electrical properties of Al-doped ZnO conducting film by magnetron sputtering (for PDP)
    Kwak, Dong-Joo
    Park, Min-Woo
    Sung, Youl-Moon
    VACUUM, 2008, 83 (01) : 113 - 118
  • [36] Effects of substrate temperature and Zn addition on the properties of Al-doped ZnO films prepared by magnetron sputtering
    Kim, Y. H.
    Lee, K. S.
    Lee, T. S.
    Cheong, B.
    Seong, T. -Y.
    Kim, W. M.
    APPLIED SURFACE SCIENCE, 2009, 255 (16) : 7251 - 7256
  • [37] Effects of in situ annealing on the properties of Al-doped ZnO thin films deposited by RF magnetron sputtering
    Deok-Kyu Kim
    Choon-Bae Park
    Journal of Materials Science: Materials in Electronics, 2014, 25 : 1589 - 1595
  • [38] Effects of Al Diffusion Process on the Electrical, Optical, and Structural Properties of Transparent Conducting Al-doped ZnO
    Bhaskar Parida
    Seonghoon Jeong
    Hyunsoo Kim
    Journal of the Korean Physical Society, 2018, 73 : 917 - 921
  • [39] Effects of Al Diffusion Process on the Electrical, Optical, and Structural Properties of Transparent Conducting Al-doped ZnO
    Parida, Bhaskar
    Jeong, Seonghoon
    Kim, Hyunsoo
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2018, 73 (07) : 917 - 921
  • [40] RF magnetron sputtering processed transparent conductive aluminum doped ZnO thin films with excellent optical and electrical properties
    Chunhu Zhao
    Junfeng Liu
    Yixin Guo
    Yanlin Pan
    Xiaobo Hu
    Guoen Weng
    Jiahua Tao
    Jinchun Jiang
    Shaoqiang Chen
    Pingxiong Yang
    Junhao Chu
    Journal of Materials Science: Materials in Electronics, 2021, 32 : 9106 - 9114
12345